JPS502472A - - Google Patents
Info
- Publication number
- JPS502472A JPS502472A JP5092173A JP5092173A JPS502472A JP S502472 A JPS502472 A JP S502472A JP 5092173 A JP5092173 A JP 5092173A JP 5092173 A JP5092173 A JP 5092173A JP S502472 A JPS502472 A JP S502472A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5092173A JPS5536185B2 (en]) | 1973-05-08 | 1973-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5092173A JPS5536185B2 (en]) | 1973-05-08 | 1973-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS502472A true JPS502472A (en]) | 1975-01-11 |
| JPS5536185B2 JPS5536185B2 (en]) | 1980-09-19 |
Family
ID=12872248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5092173A Expired JPS5536185B2 (en]) | 1973-05-08 | 1973-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5536185B2 (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51112193A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Processing method of semiconductor equipment |
| JPS52138876A (en) * | 1975-12-27 | 1977-11-19 | Fujitsu Ltd | Production of semiconductor device |
| JPS5390776A (en) * | 1977-01-17 | 1978-08-09 | Mostek Corp | Method of producing semiconductor |
| JPS55151361A (en) * | 1979-05-16 | 1980-11-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Fabricating method of semiconductor device |
-
1973
- 1973-05-08 JP JP5092173A patent/JPS5536185B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51112193A (en) * | 1975-03-28 | 1976-10-04 | Matsushita Electric Ind Co Ltd | Processing method of semiconductor equipment |
| JPS52138876A (en) * | 1975-12-27 | 1977-11-19 | Fujitsu Ltd | Production of semiconductor device |
| JPS5390776A (en) * | 1977-01-17 | 1978-08-09 | Mostek Corp | Method of producing semiconductor |
| JPS55151361A (en) * | 1979-05-16 | 1980-11-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Fabricating method of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5536185B2 (en]) | 1980-09-19 |